aCAT – Characterization Analysis Tool

You are here: Home / Solutions / aCAT – Characterization Analysis Tool

ACCELERATE TECHNOLOGY DEVELOPMENT


REQUEST FOR QUOTE

aCAT – Characterization Analysis Tool

Accelerate your development of tomorrow’s technology with AeroSpec’s Fully Automated, Characterization and Analysis Tool for Ultra-Small, High-Tech.

AeroSpec’s Characterization Analysis Tool (aCAT) enables next-generation research, development, and production-speed metrology of ultra-small components in semiconductor, probe cards, MEMS and innovative healthcare devices.  The aCAT platform enables simultaneous collection of multiple data streams including: electrical, mechanical, and optical.  Electrical tests include: fully automated ISMI current carrying measurements, CRES, continuity and more.  4-Axis, nanometer precision, linear motor driven motion system enables mechanical testing of deflection, strain, high precision repetitive cycling, CRES vs. force, micro assembly, and more.  The standard optical package includes five vision systems: four high resolution/magnification CCD cameras with field of views (FOV) on the order of 300 x 300um providing unparalleled depiction of the testing environment and product responses, one integrated confocal microscope system provides high precision measurement down to 0.01um across 3D surfaces and enables quick planarity calculations.

AEROSPEC SOLUTIONS

The aCAT hardware platform is coupled with AeroSpec’s robust aCAT v2.0 software package.  Software provides a clean, intuitive, user-interface to operate the metrology, motions systems, data log, record and execute tests.  The software contains engineering and operator use access levels.  Engineers can develop recipe driven automation containing hundreds of steps for motion, testing, and data recording.  The recipe driven system is intuitive and easy to use.  Operators can execute the steps and are prevented from modifying recipe or tool configurations.  The aCAT software is designed to collect, display, and allow robust analysis of millisecond sync’d data streams from vision, electrical, and mechanical metrologies. The tool is designed for high volumes and high usage allowing for continuous automated operation for thousands of test points.  System can be outfitted with robust safety switches, EMO, meeting all semi compliances, and includes UL508 certified electrical enclosures.

aCAT includes a robust nest design universally capable of fixturing small components and applications. The standard nest is constructed of an ultra-flat 100mm square porous ceramic vacuum chuck that allows consistent holding force.  Nest includes closed loop heater up to 200degC as well as internal chilling lines.  The nest is mounted on a 360 degree, high precision, rotation axis for precise alignment or rotation during processing.  The full assembly resides upon two axis linear motion system that can move in a work 160mm by 160mm working area.  Above the assembly, aCAT provides a quick change end effector design that allows customers to use AeroSpec’s standard offering, custom tooling, or quickly change between both.  End effectors are integrated with electrical and pneumatic porting as well a mechanical work holder tooling.  Customer’s system can be configured with any of AeroSpec’s ultra-small work holder options including 50um tweezer grippers, 5um tip tungsten probes, and 1mm cup diameter vacuum chuck.

The upper and lower compartments of aCAT’s platform include expansive rack space for controllers, computers, and electrical metrology.  Electrical metrology is configured per the customer application and typically includes loads, power supplies, and meters.  The upper rack contains a standard breakout board for quick configuration of banana plugs between metrology.  The upper rack breakout board is internally integrated to the nest located breakout board to eliminate wire clutter or obstructions.

KEY FEATURES

Motion Capabilities:
X: 160mm
Y: 160mm
Z: 110mm
Linear Motion Accuracy +/-75nm
Technology: Linear Motors
+/-180 deg Theta axis
Dedicated motion controllers and PCs

Nest:
100mm porous vacuum chuck
2um flat over 100mm
Integrated heating 0 – 200degC (PID controlled)
Integrated cooling channels

End Effector:
Quick swap end effector tooling
3-Axis 50g load cell
3-Axis 1000g load cell
Modular testing probe mount for all common probe types
Integrated electrical connectivity to metrology

Vision Systems:
Four Integrated, ultra-high resolution Point Grey CCD cameras
Custom blue LED ring, spot, and plane lights
8-channel adjustable intensity controlled lighting
Automated top and bottom cameras
Manually adjustable oblique cameras (+/-50mm range, um resolution)
Integrated 4um spot confocal microscope for 3d profiling, 10nm resolution
Profilometer (using confocal)
Positional metrology (vision inspection of XY position of probe tip)
High visibility internal machine lighting

Electrical Systems:
Keysight Power Supplies (5X)
Keysight Digital Multimeters (5X)
Chroma Electronic Loads (6X)
Power Supplies
System UPS
Dedicate Dual Xeon Rack server PC for high speed data collection
Three Monitor sit-stand workstation PC cart
AeroSpec UL power and IO enclosure
EMO and safety door switches
Integrated banana plug switch board and table top testing locations

Pre-built Functions:
Full arbitrary recipe based automation
Automated initialization and calibration
Automated pin map
Fully automated ISMI Current Carrying Capability Measurements (check out these neat guidelines I found http://www.sematech.org/docubase/document/5021atr.pdf)
Force v. Over Travel (OT)
Touch Down Testing
2 wire and 4 wire Cres
Cres v. Force
Probe tip planarity (confocal or force or touch/continuity)

Modular and Scalable = Profitability

EQUIPMENT GALLERY

EXPLORE SOLUTIONS PORTFOLIO

Get Our Recommendations

Contact us online or call us at 480.892.7195.

A member of our engineering team will respond within 24 hours.

Request for Quote