aCAT – Characterization Analysis Tool
Accelerate your development of tomorrow’s technology with AeroSpec’s Fully Automated, Characterization and Analysis Tool for Ultra-Small, High-Tech.
AeroSpec’s Characterization Analysis Tool (aCAT) enables next-generation research, development, and production-speed metrology of ultra-small components in semiconductor, probe cards, MEMS and innovative healthcare devices. The aCAT platform enables simultaneous collection of multiple data streams including: electrical, mechanical, and optical. Electrical tests include: fully automated ISMI current carrying measurements, CRES, continuity and more. 4-Axis, nanometer precision, linear motor driven motion system enables mechanical testing of deflection, strain, high precision repetitive cycling, CRES vs. force, micro assembly, and more. The standard optical package includes five vision systems: four high resolution/magnification CCD cameras with field of views (FOV) on the order of 300 x 300um providing unparalleled depiction of the testing environment and product responses, one integrated confocal microscope system provides high precision measurement down to 0.01um across 3D surfaces and enables quick planarity calculations.